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Archive: deadline passed on 03/10/2023

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Completed

Fraunhofer-Gesellschaft, München - ICP-RIE Plasma Etch System

Buyer:
Fraunhofer-Gesellschaft, Einkauf B12
Region:
EMFT Hansastraße 27d 80686 München, DEU
Published:
02/12/2023
Deadline
03/10/2023Expired

Timeline

  1. Published
  2. Submission deadline

Description

Beschaffung eines ICP-RIE Plasma Etch Systems für das Fraunhofer EMFT in München. Das System dient zur Plasmaätzung von Halbleitermaterialien. Detaillierte technische Spezifikationen sind den Vergabeunterlagen zu entnehmen.

Lots (1)

  • Lot LOT-0000

    ICP-RIE plasma etch system

Classification

CPV Codes
42990000Industriemaschinen
NUTS Codes
DE2

Details

Deadline
03/10/2023
Platform
Bund

Contact Information

Address
Fraunhofer-Gesellschaft, Einkauf B12Hansastraße 27c80686 MünchenDEU

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